ISSN:
0948-1907
Keywords:
Atomic layer epitaxy, β-Diketonate precursors, In situ synthesis, Strontium sulfide, Thin films
;
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
SrS thin films were grown on uncoated or Al2O3-coated soda lime glass substrates from hydrogen sulfide and Sr(thd)2 (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) by the atomic layer epitaxy (ALE) process. Sr(thd)2 was prepared from Sr, SrO, Sr(OH)2 or SrCO3 and Hthd inside the reactor during the deposition process. Thicknesses of the thin films were measured by optical transmission spectroscopy while crystallinity and preferred orientation were evaluated by X-ray diffraction. Under certain conditions strongly (200) oriented SrS was grown. The advantages of the in situ synthesis of the precursor are discussed.
Additional Material:
8 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/cvde.19960020208
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