ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
It is critical to measure the static and dynamic deformation of the micro beam over theirfull range of voltage and frequency inputs, which are key parameters for predicting device behavior.In this study, full-field technique by correlation of projected fringe patterns is selected to determinestatic deformation, while dynamic parameters can be obtained by DIC with high-speed CMOScamera, whose maximal frame rate is 32k f/s. The static tests of micro beams are carried out byapplying electric field forces under different dc voltage, while the dynamic tests are excited byharmonic excitations. Using the DIC method, the whole field in-plane or out-of-plane displacementsof the micro beams are obtained, and hence the dynamic characteristics by post-processing ofvibration analysis. Experimental results including the bending deformation and vibration parametersare reported and compared with finite element method. This study verifies the feasibility of thistechnique to measure both static and dynamic characteristics of MEMS components
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/52/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.326-328.211.pdf
Permalink