ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Plasma-enhanced chemical deposition processes have been studied by comparing the performance of flexible diffusion barrier layers on plastic films produced in the same reactor. Under similar experimental conditions, a higher deposition rate is achieved by microwave discharges than by bipolar, pulsed d.c. magnetron sputtering processes. However, with both discharge modes, dense hydrocarbon coatings were produced, exhibiting a barrier improvement factor up to 120 and a flexibility ranging from 1.1%–8.8% before formation of microcracks started to dominate permeation characteristics. The density of the coatings is 1.0–1.6 g cm−3 and their hydrogen content varies from 23%–33%.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1004469909547
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