ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
A method is proposed which evaluates the averaged composition of a sample in terms of the centroid of the core level XP spectrum. The method is based on the basic principle of electron spectroscopy for chemical analysis, i.e. the additive property of the chemical shifts and their proportionality to the ligand co-ordination. It allows one to calculate the averaged composition of compounds if the line shapes of spectra corresponding to stoichiometric samples (including the pure metal) are known and a few simple conditions are assumed. The main advantage of this method is that the composition can be obtained even if the individual contributions of the different oxidation states cannot be resolved or deconvoluted, so that no previous knowledge of the oxidation states or co-ordination structure is necessary. This method of calculating the composition is illustrated by its application to ZrOx, HfOx, NbNx, TaNxOy and SiNxOy obtained by different methods. The results are then compared with those obtained from the usual XPS quantitative analysis, so that further insight to the sample near-surface structure and composition can be gained by this combined study.
Additional Material:
5 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740190140
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