ISSN:
1662-7482
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Most mechanical parts like bearings, gears, and shafts are produced by finishingprocesses such as hard turning, grinding and/or honing. The durability and reliability of theseprecision products are directly influenced by mechanical behavior of material. If those parts are inmicro nano scale such as micro interconnector, micro valve, micro actuator, and micro switch inthat case micro nano mechanical properties is an important factor for better performance. Thispresent paper discusses the low energy ECR ion beam irradiation effects on mechanical property ofmaterial in micronano scale. To complete this research ion beams were irradiated for differentaccelerating energy to Si surface. Nano indentations were done for hardness and elasticitymeasurement. AFM was used for roughness and depth measurement. From data analysis It showsaccelerating energy is an important factor to control mechanical property of material during nanoscale fabrication by ion beam
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/38/transtech_doi~10.4028%252Fwww.scientific.net%252FAMM.10-12.344.pdf
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