ISSN:
0032-3888
Keywords:
Chemistry
;
Chemical Engineering
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
A mechanistic hypothesis is presented which explains the radiation chemistry of poly(methyl α-haloacrylate)s. In order to test the hypothesis poly(methyl α-trifluoromethylacrylate) PMTFMA was synthesized together with copolymers of methyl methacrylate (MMA), and the α-trifluoromethyl analog. The mechanistic hypothesis predicts that PMTFMA should have a higher G scission than PMMA and that it should have no crosslinking propensity. This prediction was verified by experiment. Imaging of PMTFMA as a positive e-beam resist is also presented. The new material is a more sensitive resist than PMMA.
Additional Material:
4 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/pen.760231805
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