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Laser direct writing of β-Co/Ga and Mn/Ga alloy microstructures from organometallic single-source precursors (1996)

Miehr, A. ; Fischer, R. A. ; Lehmann, O. ; [et al.]

New York, NY [u.a.] : Wiley-Blackwell

Advanced Materials for Optics and Electronics 6 (1996), S. 27-32

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Details

ISSN: 1057-9257

Keywords: direct writing ; Co/Ga ; Mn/Ga alloys ; single-source precursor ; Chemistry ; Polymer and Materials Science

Source: Wiley InterScience Backfile Collection 1832-2000

Topics: Electrical Engineering, Measurement and Control Technology , Physics

Notes: β-Co/Ga and Mn/Ga alloys have been deposited on various substrates by laser direct write chemical vapour deposition (LCVD) from novel single-source precursors. The preformed alloy stoichiometry of 1:1 defined by the metal ratio of the precursors, (CO)4Co-GaEt2(NMe3) (1) and (CO)5Mn-GaEt2(NMe3) (2), is retained within the deposited structures. The depositions were up to 1.5 μm thick and the lateral dimension (4 μm) was determined by the diameter of the laser focus. The deposited structures were contaminated with ∼10 at. % C and O (by AES).

Additional Material: 6 Ill.

Type of Medium: Electronic Resource

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