Electronic Resource
Springer
Naturwissenschaften
68 (1981), S. 513-518
ISSN:
1432-1904
Source:
Springer Online Journal Archives 1860-2000
Topics:
Biology
,
Chemistry and Pharmacology
,
Natural Sciences in General
Notes:
Abstract After a brief historical review, the key elements of LSI silicon technology are described, using illustrative examples. Superintegration as well as its limits are discussed. The manufacturing process of a superintegrated 64k-bit memory chip shows the essential issues of a modern high-volume production. An outlook exhibits possible developments even in non-silicon technologies.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF00365375
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