ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Micro abrasive jet machining (MAJM) is a high effective economical technology for threedimensional micro structure fabrications of brittle materials. It is widely used in the fabrication ofsemiconductors, electronic devices, micro electro-mechanical systems (MEMS), optical-electronicand optical devices, and medical instruments. In this paper, based on the experimental study ofMAJM for glass, the influences of the nozzle type/size and abrasive type on the material erosion rateand structure profile are analyzed. The results show that the rectangular nozzle can yield a moreaccurate and efficient machining performance due to reduced flux effect. By contrast, with roundnozzle all the cross section profiles of the machined patterns show rounded V-type shape. Therectangular nozzle is able to produce geometry with flat shape. The machining area is almostindependent of the abrasive hardness, and the erosion rate increases with the increase in the hardnessof the abrasive grits. The nozzle geometry is of great importance for machining accuracy and theefficiency
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/55/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.359-360.404.pdf
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