ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
In this study, focused gallium ion (Ga+) beam is utilised to fabricate micro/submicronspacing gratings on specimen surface. The grating types include: parallel, cross, and hybrid (gratingwith double-frequency). Several hybrid gratings with double frequency were produced incombination mode or superposition mode, which have a good potential to measure deformationwithin different range. Techniques for producing different type of gratings are discussed in detail.As an application, a 5000 lines/mm grating was fabricated on an amorphous SIC MEMS cantileverand was successfully used to measure its virtual strain with aid of digital moiré. The experimentalresults verify the feasibility of fabricating high frequency grating on metal or non-metal surfaceusing the FIB milling and the resultant grating can be used to measure micro-deformation
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/41/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.47-50.710.pdf
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