ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
Pressure sensitive capacitance of laser-induced chemical vapor deposition processed nanosized silicon nitride has been studied. It is found that the capacitance varies linearly with the pressure and its sensitivity is as high as 2.64 pf/Torr. The capacitance pressure sensitivity results from the huge interfaces and microvoids existing in the nanomaterials.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1144044
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