Publication Date:
2016-09-21
Description:
We report the significant increase in the electrical conductivity, by five orders of magnitude, of Re-doped β -MoO 3 epitaxial films grown using reactive DC magnetron sputtering. Re atoms were successfully incorporated into the films by using Mo-Re alloy targets, although the film compositions deviated significantly from those of the targets. Pristine β -MoO 3 exhibited a conductivity below 10 −7 S/cm, whereas β -Mo 0.982 Re 0.018 O 3 exhibited a conductivity of 1.2 × 10 −2 S/cm and a high optical transmittance of 67% (average) in the visible region. Furthermore, transparent conducting properties were reproduced in a polycrystalline film grown on a glass substrate, indicating the high potential of these films for use as transparent conductors.
Electronic ISSN:
2166-532X
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
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