Digitale Medien
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
66 (1989), S. 5156-5160
ISSN:
1089-7550
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
A focused argon-ion laser beam (λ=350 nm) is used to fabricate optical channel waveguides on oxidized silicon wafers using a commerically available spin-on polymer. The polymerization process is photon induced, thus allowing the reaction to occur in a room-temperature ambient. This allows the fabrication of waveguides on a variety of substrates including those with low melting points. The losses in these waveguides are typically less then 1 dB/cm, making them applicable to a variety of optical interconnect problems. In particular, we demonstrate their use in the fabrication of an optical power tap.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.343750
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