ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Modern material technology relies increasingly on processes for surface modification andcoating. Generally, we are lacking a possibility to monitor the progress of such processes. Thus theoutcome can only be analyzed after the end of the whole process cycle. We are proposing to usespectroscopic ellipsometry (SE) as an on-line monitoring tool. SE, as an optical method, is notaffected by high temperatures, process gases, plasmas, etc. It can be used as a monitoring tool or asensor for closed loop control of processes. The main difficulty is the on-line interpretation of SEdata. Depending on the nature of the process monitored or controlled, different models are used forthe interpretation. These models predict the SE response depending on different parametersdescribing the surface under investigation. A fitting process is used to solve the inverse problem,i.e. extracting material data from the SE spectra. We expect increased process stability and shorterdevelopment time as a practical benefit from the use of SE
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/13/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.518.423.pdf
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