ISSN:
1432-1858
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Technology
Notes:
Abstract In order to make micro 3-D structures, we are designing a table-sized factory, namely “Nano Manufacturing World (NMW)”. In NMW, we challenged to use a new process fused by semiconductor process for preciseness and machine process for 3-dimensionality. In order to realize the new process, we designed three new mechanisms in this paper: multi-face shape making beam, co-focus rotational robot and micro mechanical tools. Through an evaluation to actually make a micro “Gojunoto” with the mechanisms, we confirmed their validities for functions of integration of 3-D shape construction and assembly.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01294803
Permalink