ISSN:
1573-4803
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Dry-etch processing of lithium niobate acousto-optic Bragg cells using ion beams of low incident energies (500 eV) induces significant modification to the electrical and electro-mechanical properties of the surface region, severely compromising device operation. The affected properties are largely restored by thermal annealing at relatively low temperatures.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01151843
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