ISSN:
1013-9826
Quelle:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Thema:
Maschinenbau
Notizen:
Recently, ultra-precision machining of components and dies for information andcommunication industries, such as fresnel mirrors, diffraction lens, and die for super high intensityreflective sheet is one of the major target. To machine three-dimensional micro patterns, such as superhigh-intensity reflective sheets, ultra-precision and mirror surface fabrication processes are required.It has been reported, however, that continuous cutting, such as turning or shaping, is more suitable toultra-precision machining. Many researchers have studied the manufacturing process of reflectivesheet dies to obtain high form accuracy and surface quality. In this paper, ultra-precision shapingsystem was developed to fabricate micro patterns mechanically. In order to estimate performance ofthe shaping system, micro V-shaped grooves and tetrahedron pattern arrays for a super high intensityreflective sheet was applied. Also, a new measuring technology to inspect form and machining errorsof a machined tetrahedron patterns was proposed. The results show that shaping system has apositioning accuracy of x, y, z axis with 100, 10, 10nm resolution, respectively. Micro V-shapedgrooves could be machined at various depths and micro tetrahedron patterns with a good quality wereobtained as well
Materialart:
Digitale Medien
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.469.pdf
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