ISSN:
1662-8985
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
CrN/AlSiN multilayer coatings with bilayer period (Λ) between 2.3 nm and 8.0 nm weresynthesized from Cr and AlSi (Si=20 and 66 at.%) targets by using a closed-field unbalancedmagnetron sputtering (CFUBMS) and their crystal structure, chemical composition and mechanicalproperties have been investigated by glow discharge optical emission spectroscopy (GDOES), Xraydiffractometry (XRD), X-ray photoelectron spectroscopy (XPS) and nano-indenter. In order toevaluate the thermal stability of the coatings annealing treatments for 30 min at temperaturebetween 800 °C and 1000 °C were performed in air. The thermal stability of the CrN/AlSiNmultilayer coatings was improved with increasing Si content. In case of the coating with Si contentof 18.2 at.%, a superior thermal stability was exhibited even after annealed at 1000 °C and therelatively high hardness of 25 GPa was maintained without a significant decrease in hardness. Thereduced oxidation rate of the coatings at high temperature could be attributed to the formation of theamorphous Si3N4 phase around the crystalline AlN phase
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/41/transtech_doi~10.4028%252Fwww.scientific.net%252FAMR.47-50.1498.pdf
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