Publication Date:
2016-04-19
Description:
A three-step process has been demonstrated to improve the performance of photodiode by creating nanocone forest on the surface of photodiode as an antireflection layer. This high-throughput, low-cost process has been shown to decrease the reflectivity by 66.1%, enhance the quantum efficiency by 27%, and increase the responsivity by 25.7%. This low-cost manufacture process can be applied to increase the responsivity of silicon based photonic devices.
Print ISSN:
1687-725X
Electronic ISSN:
1687-7268
Topics:
Electrical Engineering, Measurement and Control Technology
Permalink