ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The rate of increasing storage capacity is being slowed by the inability to produce evercloser flying heights between the sliders and disks. In order to allow the sliders to ‘fly’ faster andmore closely to the disk surfaces, it is important to control the surface of substrates of hard disks toa super-smooth level. However, there are no sophisticated instruments and assessment standardsfor super-smooth surfaces. In this research, the authors attempt to build a measurement andassessment protocol for the evaluation of super-smooth surfaces using a white-light opticalinstrument CCI (Coherence Correlation Interferometer). The key advantage of this instrument is itsexceptionally high vertical resolution which is an order of magnitude better than comparablesystems. This paper focuses on discussing the factors influencing the experimental results; theyinclude sampling intervals, the number of measurements, scan size, filter cut-off wavelength etc.Based on the experimental results, an optimum protocol for measurement and assessment arerecommended, and then the authors measure and compare the surface roughness of six hard disksderived from differing chemical mechanical polishing (CMP) ‘abrasives’. It has been found that:(1) the roughness values of the six hard disks surfaces have all reached a sub-nanometre level; (2)CMP regimes have little influence on the topography of the hard disk surfaces
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.1174.pdf
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