ISSN:
1662-9752
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
The micromachining technique for the fabrication of Fe-36%Ni (Invar®) microgroovesusing a novel laser-induced wet etching system with an optical fiber as the light waveguide andmachining tool is investigated. Microgrooves fabricated at the optimal process conditions with theproposed etching system have good surface morphology and dimensional accuracy. It is shown thatthe variation of etch profiles such as etch width and depth depends significantly upon the processparameters. Fiber damage, which is attributed to macrobubbles, can be dramatically reduced byadjusting the distance between the workpiece surface and the fiber terminal. The effects of processparameters such as laser power, scan speed, and threshold distance on etch width, depth, and crosssectionalprofiles are reported and the optimal process conditions to fabricate Invar® microgrooveswith excellent shape and size are provided. Also, the applicability of the Invar® microgrooves forthe manufacturing of shadow mask for an organic light emitting diode (OLED) is demonstrated
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/18/transtech_doi~10.4028%252Fwww.scientific.net%252FMSF.580-582.503.pdf
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