ISSN:
1662-9779
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Physics
Notes:
Megasonic cleaning using de-gassed water (less than 2ppm N2, O2, CO2) in a 300mm batchimmersion tool often does not give optimal particle performance, with particle streaks and clustersadded onto the wafer, and low particle removal efficiency (PRE). When water was re-gasified withN2, the resultant stable cavitation activity reduced particle adders and increased PRE. With N2concentration increased to just above 5ppm, number of particle adders decreased by three folds.Optimal particle performance could be obtained by operating at an N2 level close to saturation
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/02/24/transtech_doi~10.4028%252Fwww.scientific.net%252FSSP.134.217.pdf
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