Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Journal of Applied Physics
64 (1988), S. 1586-1588
ISSN:
1089-7550
Source:
AIP Digital Archive
Topics:
Physics
Notes:
High-quality, submicrometer Nb/AlOx /Nb Josephson junctions were fabricated. The junction area was defined by anodizing an upper Nb electrode using a thin SiO2 mask. By utilizing the anodized Nb as an etch stop during the reactive ion etching of the contact hole in an SiO2 insulator, we could make a junction smaller than the contact hole size. Using stress-free Nb for the junction electrodes was crucial in achieving good current-voltage characteristics. High-quality Nb/AlOx /Nb junctions as small as 0.7 μm square were produced. The quality parameter Vm was greater than 30 mV for a jc of 6800 A/cm2.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.341792
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