ISSN:
1089-7550
Quelle:
AIP Digital Archive
Thema:
Physik
Notizen:
Plasma-enhanced organometallic chemical vapor deposition process has been developed to prepare high Tc superconducting films. The volatile organic precursors of Y(fod)3, Ba(hfa)2, and Cu(hfa)2 were decomposed with a microwave discharge plasma. Optical emission spectroscopy was used to determine the identity of the species produced during the vaporization and decomposition process. In this process, Y, Y+, Ba, Ba+, Cu, and Cu+ species were detected. After annealing in air, the films deposited on the (100) SrTiO3 substrate had preferential orientation of the crystalline c-axis perpendicular to the substrate surface. The characterization of this process is discussed comparing a hollow cathode YBaCuO plasma with the laser ablation experiments published.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1063/1.346710
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