ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
We have constructed a novel contact stylus profilometer which is, in a certain sense, acombination of a lever system, an x-y stage, a vertical scanning stage and a Linnik microscopeinterferometer with a spatially and temporally incoherent light source. The system has largemeasurement range, high precision and small touch force. Its vertical measuring range is ±5 mmwith a resolution below 2 nm, and the horizontal measuring range is ±25 mm in x- and y-range witha resolution of 1.25 μm. This paper describes the system and its performance along with results ofmeasuring some samples
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.371.pdf
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