ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Laser patterning technology of indium tin oxide thin films has been studied in thisresearch. ITO thin films, which usually coat on the glass and the plastic substrate, have beenadopted in the flat panel displays (FPDs) and the plasma display planes. The conventional methodof the ITO patterning usually uses the wet chemical etching processing. However, the wet etchingprocessing is not adopted in the plastic materials because the chemical fluid usually damages theplastic substrate. The laser direct writing processing has been developed and replaces the wetetching processing. This investigation is interested in the laser patterning used the third-harmonicNd:YAG laser (355 nm) to ablate the ITO films of glass substrate. The scanning electronmicroscope (SEM) measures the characterization of the ablated grooves used the differentparameters, including the laser energy, the repetition rate and the feeding speed of the table. Finally,the effect parameters of laser ablating ITO film will be presented in this paper
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.315.pdf
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