Publication Date:
2018-11-30
Description:
This paper reports a design of an exchangeable miniaturized mass spectrometry chip using spring-loaded pins and O-rings for electrical and fluidic connections. This planar microelectromechanical system (MEMS)-chip works with 300 µm high silicon structures between two borosilicate glasses and has a size of 13 mm × 7 mm. Because of its small size a small vacuum pump is sufficient, and it is suitable for mobile measurements and portable applications. Because of exchangeability of MEMS-chips with fluidic and electrical high voltage connections a direct comparison between chips is possible.
Electronic ISSN:
2504-3900
Topics:
Technology
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