ISSN:
1573-2711
Source:
Springer Online Journal Archives 1860-2000
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract Nearly fifty lubricants have been investigated for use in theDigital Micromirror DeviceTM (DMDTM). Theexploration has ranged from self-assembled monolayers (SAMs),to fluids, to solid lubricants. This paper discusses several ofthe various approaches that have been taken to lubricate thismicroelectromechanical systems (MEMS) device and to reduce the adhesion between its contacting surfaces.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1019129021492
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