Electronic Resource
[S.l.]
:
American Institute of Physics (AIP)
Review of Scientific Instruments
57 (1986), S. 1248-1250
ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
We have developed a simulated load technique for estimating power dissipation and effective impedance of the discharge which is useful over a wide range of driver frequencies. This is used to calculate the power delivered to the plasma and plasma current for frequencies from 0.12 to 13.56 MHz. This technique allows an efficiency calibration curve to be made for a given match circuit which can be quickly applied to any new discharge condition to give match efficiency.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1138636
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