ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
To meet the demand of large displacement measurement instrument with nanometerprecision, this paper introduces the metrological grating with the nanometer measurement precisionand large displacement, based on two times' Moiré fringe principle. Its basic principle is that twoindicated gratings are fixed on the same measuring base scale, when they move relatively to the scalegrating, two groups of one time Moiré fringe will be produced, then two groups of lens are adopted tomake the fringe move oppositely, at last the two times Moiré fringe will be produced throughinterference on the photoelectronic receive element. By subdivision of the two times Moiré fringe,this system can achieve 2.70×10-10m measurement resolution. In addition, this paper also analyse theoptics system and light source
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.501.pdf
Permalink