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  • 1
    Electronic Resource
    Electronic Resource
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 359-360 (Nov. 2007), p. 404-408 
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Micro abrasive jet machining (MAJM) is a high effective economical technology for threedimensional micro structure fabrications of brittle materials. It is widely used in the fabrication ofsemiconductors, electronic devices, micro electro-mechanical systems (MEMS), optical-electronicand optical devices, and medical instruments. In this paper, based on the experimental study ofMAJM for glass, the influences of the nozzle type/size and abrasive type on the material erosion rateand structure profile are analyzed. The results show that the rectangular nozzle can yield a moreaccurate and efficient machining performance due to reduced flux effect. By contrast, with roundnozzle all the cross section profiles of the machined patterns show rounded V-type shape. Therectangular nozzle is able to produce geometry with flat shape. The machining area is almostindependent of the abrasive hardness, and the erosion rate increases with the increase in the hardnessof the abrasive grits. The nozzle geometry is of great importance for machining accuracy and theefficiency
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    s.l. ; Stafa-Zurich, Switzerland
    Key engineering materials Vol. 389-390 (Sept. 2008), p. 381-386 
    ISSN: 1013-9826
    Source: Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
    Topics: Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
    Notes: Abrasive Suspension Jets (ASJ) is a new micro processing technique developed formicro processing of hard and brittle materials based on the traditional Abrasive Water Jet (AWJ).Based on drilling experiments of glass using MASJ technology, the dependence of materialremoval, the depth and the diameter of the machined holes on the process parameters, such asworking pressure, processing time, standoff distance, incidence angle and concentration ofabrasives were investigated. Experimental results show that the material removal is approximatelyproportional to working pressure, processing time and concentration of abrasives, except thestandoff distance. It is founded that the processing time is the most remarkable influence factor onthe material removal and the depth of the holes. But the working pressure doesn’t show obviouseffects to the material removal and the depth of hole with lower pressure in MASJ. The increaseof standoff distance will decrease the material removal and depth of hole, and the concentration ofabrasives can improve a few of drilling ability. Further, it is founded that longer processing timeand smaller standoff distance will achieve higher MASJ drilling efficiency and better quality ofhole, with 90 degree jet incidence angle
    Type of Medium: Electronic Resource
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