ISSN:
1662-0356
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Natural Sciences in General
,
Technology
Notes:
The achievement of nanosmooth, ultrathin diamond coatings with nanosized grains ismandatory for the successful utilization of diamond in areas such as microelectromechanicalsystems, field emission and surface acoustic waves devices.The bias enhanced nucleation technique (BEN) allows to achieve high nucleation density diamondfilms, where the average distance between diamond nuclei can be as low as 10-20nm. Moreover bydiluting the gas precursors (H2 and CH4) into noble gas (Ar, He) during growth, the formation oflarger crystals can be inhibited, giving rise to nanocrystalline films without a degradation of thefilm quality, such as the presence of more graphitic bonds.In this paper we report the growth of ultrathin, smooth, high quality nanodiamond films obtained bycombining the two techniques in a HFCVD reactor.A variety of nanocrystalline diamond films with a grain size as low as 10nm and thickness up to1μm were obtained. The nucleation process and ensuing growth of the film were monitored bySEM observation. Spectroscopic measurements were also performed to study the microstructureand to assess the quality of the deposited material
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/42/transtech_doi~10.4028%252Fwww.scientific.net%252FAST.48.44.pdf
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