ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The paper deals with an x-ray lithography station at the VEPP-3 storage ring of the Institute of Nuclear Physics (Novosibirsk) and some recent results are reported. The utilization of rather high quantum energies is shown not to deteriorate the quality of x-ray replication. The presented work is an extension of the studies that were performed at VEPP-2M [E. S. Gluskin, A. A. Krasnopyorova, G. N. Kulipanov, V. P. Naz'mov, V. F. Pindyurin, A. N. Skrinsky, and V. V. Chesnokov, Nucl. Instrum. Methods 208, 393 (1983)].
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1142656
Permalink