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  • 1
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 65 (1989), S. 1846-1851 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: An emission spectroscopy study is made of an rf magnetron discharge used to sputter deposit CdTe in Ar. The dependence on gas pressure and rf power of the strongest Cd, Te, and Ar emission line intensities (I) is determined for both the negative glow and the positive column. It is shown that the sputtered atom density NCd (NTe) is proportional to ICd/IAr (ITe/IAr) as the rf power is varied at pressures near 0.5 Pa, and that such a relationship does not hold as the gas pressure is varied. From the power dependence of IAr it is deduced that Ar atoms are excited to emitting states directly from the ground state; no evidence for the influence of intermediate metastable states is observed.
    Type of Medium: Electronic Resource
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  • 2
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 60 (1986), S. 2530-2535 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Depending on the deposition conditions, amorphous SixHy alloy films prepared by planar rf reactive magnetron sputtering exhibit one of three types of microstructure: (i) type A with no discernible microstructural features down to the 20-A(ring) level and with a smooth uniform density; (ii) type B consisting of high-density regions of 50–200-A(ring) lateral dimensions separated by a low-density network; and (iii) a two-level (type C) microstructure consisting of 300–500-A(ring) dimensions columns separated by a pronounced low-density network. The columns, in turn, are composed of 50–200-A(ring) dimension high-density regions interspersed with low-density network. The Si-2p level in these alloy films, determined by x-ray photoelectron spectroscopy, is observed to be strongly influenced by the microstructure of the film. A shift in the Si-2p level, systematically varying with the hydrogen concentration, is observed in alloy films with type B and type C microstructures. No shift is observed, irrespective of the hydrogen concentration, in alloy films with type A microstructure. The photoelectron spectra are examined in the light of the vibrational spectra of the films as measured by Fourier transform infrared techniques. The dependence of the Si-2p level shift on the microstructure and the variation with hydrogen concentration are explained qualitatively in terms of the differences in the silicon–hydrogen bonding in amorphous SixHy films with dissimilar microstructures.
    Type of Medium: Electronic Resource
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  • 3
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 1635-1640 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: The plasma potential and the electron density and electron temperature of an rf magnetron discharge used for the ion-assisted growth of PbTe epilayers on BaF2 are measured using Langmuir probe diagnostics. The effect of rf potentials at the probe on the measured plasma parameters is reduced by driving the probe to follow the plasma potential. The discharge parameters are determined as a function of substrate bias voltage and substrate rf power. The ion energy and flux necessary for the epitaxial growth of (111) PbTe on (111) BaF2 are determined.
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  • 4
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 68 (1990), S. 5796-5803 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Photoluminescence spectra are measured for sputter-deposited, heteroepitaxial (100)CdTe layers of thicknesses up to 14 μm grown on (100)KBr substrates. Three emission bands, at 0.81, 1.00, and 1.41 eV, are observed. From comparison of the photoluminescence spectra of the epilayers with those of several bulk single-crystal and polycrystalline samples, the origin of the 1.41-eV band, reported previously by many workers, is correlated to structural defects arising from lattice mismatch with the substrate. It is concluded that the 0.81- and 1.00-eV bands are due to defect levels resulting from nonstoichiometric growth. The injection level and temperature dependence of the photoluminescence suggest that the 1.41- and 0.81-eV emissions are donor-acceptor transitions whereas the 1.00- eV emission is a conduction-band-acceptor transition.
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  • 5
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 69 (1991), S. 8210-8216 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Sputter-deposited, heteroepitaxial (100)CdTe layers prepared at growth temperatures of 300–325 °C are found to be p-type with high dark resistivities on the order of 2×105 Ω cm. The epilayers are highly photoconducting and exhibit photoconductivity to dark conductivity ratios as high as 1×106 at around 200 K. The photoconductivity is observed to exhibit a sublinear dependence on illumination intensity and a thermally activated behavior. The model developed by Simmons and Taylor [J. G. Simmons and G. W. Taylor, J. Phys. C: Solid State Phys. 7, 3051 (1974); G. W. Taylor and J. G. Simmons, J. Phys. C: Solid State Phys. 7, 3067 (1974)] to explain photoconductivity in amorphous semiconductors is shown to be applicable to these epitaxial layers. Hole traps at 0.40 and 0.23 eV above the valence band have been determined from the temperature dependence of the photoconductivity. Acceptor levels at 0.62 and 0.07 eV above the valence band, determined from the temperature dependence of the dark conductivity, are discussed in relation with photoluminescence bands at 0.81 and 1.00 eV reported earlier [S. R. Das, J. G. Cook, N. L. Rowell, and M. S. Aouadi, J. Appl. Phys. 68, 5796 (1990)] in these epilayers.
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  • 6
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 57 (1985), S. 2963-2966 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Minority-carrier diffusion lengths have been measured in electron-beam-induced current experiments with the electron beam of the scanning electron microscope both parallel and perpendicular to a Schottky barrier on single-crystal silicon. Results from the two geometries are compared. The usefulness of the top surface geometry (beam perpendicular to the barrier) has been extended by measuring both the short-circuit current and its derivative as a function of position, allowing the diffusion length to be calculated without knowing the exact position of the Schottky-barrier edge. This is particularly useful when the barrier edge is indistinct, as often occurs for evaporated or sputtered barrier layers. Measurement of the derivative signal has been accomplished by position modulation of the scanning electron beam combined with a lock-in amplifier for signal detection.
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  • 7
    Electronic Resource
    Electronic Resource
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 59 (1986), S. 3160-3168 
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Amorphous SixHy alloy films have been prepared by planar rf reactive magnetron sputtering with a wide range of electrical, optical, optoelectronic, and microstructural characteristics. The photoconductivity of the films is observed to depend sensitively on the microstructure. In particular, the interrelationship between the dark conductivity (σdark), the photoconductivity (σph), the photoconducting gain (σph/ σdark), and the optical band gap (Eg) of a film is strongly influenced by the microstructure. It is shown that films with a particular combination of σdark, σph, σph/ σdark, and Eg values can only be prepared with a specific type of microstructure.
    Type of Medium: Electronic Resource
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  • 8
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 56 (1990), S. 2430-2432 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Epitaxial (111)CdxPb1−xTe//(111)BaF2 films in the rocksalt structure have been made by codeposition from CdTe and PbTe magnetron targets in an rf discharge onto chemipolished substrates at 320 °C. Films were prepared with x values from 0 to 0.47, well past the range of bulk thermodynamic solubility. Raman spectroscopy, Auger spectroscopy, and transmission electron microscopy showed phase segregation had not occurred. The lattice spacing in the growth direction was observed to be insensitive to x.
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  • 9
    Electronic Resource
    Electronic Resource
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 68 (1996), S. 3588-3590 
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Electrical and structural properties of platinum monosilicide (PtSi) in deep submicron lines are reported. The sheet resistance of the silicide films was found to be rather independent of the linewidth down to dimensions as small as 0.15 μm. Plan-view and cross-sectional transmission electron microscopy was performed to study the structural properties of these films, including their gain structures and lateral growth. The insensitive nature of the electrical properties of the silicide films to the linewidths is correlated with their structural properties. © 1996 American Institute of Physics.
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  • 10
    Electronic Resource
    Electronic Resource
    s.l. : American Chemical Society
    Analytical chemistry 43 (1971), S. 1847-1853 
    ISSN: 1520-6882
    Source: ACS Legacy Archives
    Topics: Chemistry and Pharmacology
    Type of Medium: Electronic Resource
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