ISSN:
1436-5073
Keywords:
microwave-induced plasma
;
surface wave
;
neutral gas temperature
;
absorbed power calculations
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract The investigation of surface-wave plasmas has led to a considerable improvement in the current understanding of the general HF discharges. The power loss per electron, π, is a parameter of equilibrium which plays the leading role in the modelling of the surface-wave plasma and in the elaboration of a unified model for HF discharges in general. In this paper, we use the total losses by ambipolar diffusion and recombination to obtain an empirical description of the dependence of π on the neutral gas temperature.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01244672
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