Electronic Resource
Woodbury, NY
:
American Institute of Physics (AIP)
Applied Physics Letters
73 (1998), S. 1772-1774
ISSN:
1077-3118
Source:
AIP Digital Archive
Topics:
Physics
Notes:
Mg-doped p-GaN films have been grown on sapphire substrate with a multilayered buffer (MLB) by metalorganic chemical vapor deposition and characterized by photoluminescence spectroscopy. The MLB consists of GaN/AlxGa1−xN (0〈x≤1) superlattice-like layer structures although the material combination as well as the periodicity and uniformity in layer thickness and composition are not essential issues for constituting a MLB. It was found that the p-GaN films grown on MLBs gave much stronger optical emission than those grown on conventional GaN or AlxGa1−xN (0〈x≤1) single-layer buffer or GaN/AlxGa1−xN double-layer buffer under identical reactor configuration. This fact indicates that, by using the newly-developed MLB, the crystalline quality of group-III nitride-based-semiconductor epitaxial layers can be significantly improved. © 1998 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.122277
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