ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Grazing incidence optics used in soft X-ray microscopes require supersmooth surface andhighly accurate figure. We considered the fabrication of a Wolter type I mirror, one of grazingincidence optics, with axial-symmetric inner reflecting surfaces using single-point diamond turning.Electroless nickel was chosen as reflecting material Cutting conditions for machining the innerreflecting surface were restricted because of long arm of a single-crystal diamond tool. Themachined Wolter type I mirror had approximately 270 nm P-V in figure error and 3 nm Ra insurface roughness. The direct-machined Wolter type I mirror could be successfully used in a soft Xraymicroscope based on laser-produced X-ray source
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.39.pdf
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