ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A high-accuracy full field 3-D surface profilometer using digital structured fringeprojection is presented in the article. In the proposed method, a depth-focus response curve can beestablished by performing a confocal scanning along the optical axis of the measurement systemwhen a digital fringe is controlled and projected by a digital micromirror device (DMD). To avoidspecular light diffusive problems, the developed method projects spatially encoded digital fringepatterns with modulated light intensity onto a shinny lens surface, in order to achieve full field andhigh accuracy measurement. Some of spherical microlenses have been measured to attest thefeasibility of the developed approach. The depth measurement resolution can reach up to 0.1μm andthe averaged measurement error was verified to be a submicro scale
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/56/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.364-366.113.pdf
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