ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
A flexible temperature sensor array and a scanning system are developed in this paper. A16×16 temperature sensor array in a 25×20 mm2 area is fabricated on a flexible copper-PI substrateusing MEMS fabrication technology. Platinum is employed as the temperature sensing material,which is often so called the resistance temperature detector (RTD). Copper patterns on both sides ofthe flexible substrate serve as the row and column interconnects for scanning circuitry. In eachelement of the temperature sensor array, the resistance of platinum, which is patterned by lift-offprocess, can be measured by the scanning system
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.381-382.383.pdf
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