ISSN:
0167-9317
Keywords:
Synchrotron radiation lithography
;
X-ray masks
;
applications
;
aspect ratio
;
complex shapes
;
equipment
;
galvanoforming
;
microconnectors
;
microstructures
;
plastic moulding
Source:
Elsevier Journal Backfiles on ScienceDirect 1907 - 2002
Topics:
Electrical Engineering, Measurement and Control Technology
Type of Medium:
Electronic Resource
URL:
http://linkinghub.elsevier.com/retrieve/pii/0167-9317(86)90004-3
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