ISSN:
1572-817X
Keywords:
high-resolution displacement measurements
;
interferometric position sensor
Source:
Springer Online Journal Archives 1860-2000
Topics:
Electrical Engineering, Measurement and Control Technology
,
Physics
Notes:
Abstract A small Michelson interferometer has been configured as a tracking mirror displacement sensor in order to achieve both large dynamic range (2.1 mm) and excellent sensitivity $${\rm{(2x10}}^{--{\rm{14}}} {\rm{m/}}\sqrt {{\rm{Hz)}}} {\rm{ }}$$ across a broad frequency range (6Hz–3 kHz). The interferometer is illuminated by a simple LED, uses broadband, non-polarising beamsplitters and contains no lensing optics. A DC-coupled balanced detector provides an error signal that is used to position the tracking mirror of the Michelson interferometer so as to maintain an interferometer operating position close to the centre of a particular fringe. The total interferometric sensor provides a small, simple and cost-effective means of achieving high-resolution displacement measurements.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1006991717589
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