ISSN:
1089-7623
Source:
AIP Digital Archive
Topics:
Physics
,
Electrical Engineering, Measurement and Control Technology
Notes:
The compact ring AURORA has exhibited excellent performance since 1989. Other than x-ray lithography for semiconductor device fabrication, research activities ranged from infrared to hard x-rays. Especially, the usefulness of the x-rays from AURORA could be verified in several experiments underway. Short beam lines and increased stored beam current made it possible to utilize the hard x-rays and currently a double-crystal monochromator for XAFS experiments is being installed. © 1995 American Institute of Physics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1063/1.1145686
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