ISSN:
1551-2916
Source:
Blackwell Publishing Journal Backfiles 1879-2005
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
,
Physics
Notes:
A novel ceramic microfabrication process—based on the idea of silicon carbide (SiC) reaction sintering within a micromachined silicon mold—has been developed to produce a SiC microroter for miniaturized gas turbines. The new process involves the micromachining of silicon molds; filling the molds with powder mixtures of α-SiC, graphite, and phenol resin; bonding the molds with an adhesive; reaction sintering by hot isostatic pressing (HIP); and the releasing of a reaction-sintered workpiece from the mold by wet etching. Using this process, we have successfully fabricated SiC microrotors with a diameter of 5 mm, whose complicated geometry was well transferred from the negative shape of the micromachined silicon mold. The reaction-HIPed SiC ceramics within Si molds showed reasonably good mechanical properties, which are comparable to those of the commercialized reaction-sintered SiC ceramics.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1111/j.1151-2916.2002.tb00077.x
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