ISSN:
1436-5073
Keywords:
X-ray microanalysis
;
coatings
;
density
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract Densities of gold and carbon coatings prepared by standard methods of vacuum evaporation and magnetron sputtering were measured using grazing incidence X-ray reflection. The densities of magnetron sputtered layers were practically identical to that of the bulk material whereas vacuum evaporated carbon exhibited a density decrease by 9%. Calculations suggest that the real density of coatings is one of the parameters which must be taken into account when performing quantitative electron probe X-ray measurements, namely under the conditions disabling precise direct measurement of the mass thickness.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01244558
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