ISSN:
1013-9826
Source:
Scientific.Net: Materials Science & Technology / Trans Tech Publications Archiv 1984-2008
Topics:
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Developed with micro technology, the microelectrode is the key manufacture technique.The micro electrical machining, mainly including micro electrical discharge machining (EDM) andelectrochemical machining (ECM), is one of the important technologies of microelectrodefabrication. Firstly, the microelectrode was fabricated with a counter block of EDM while thecylindrical tungsten electrode fed along radius and its axis. Then the fabrication technology of ECMwas also introduced. The pulses power supply and the non-passivation electrolyte were used. Thecylindrical tungsten electrode also can be served as the probe of the scanning probe microscopy,which fabricated by ECM. Through comparisons, the surface roughness, machining efficiency, andmachining capability of the microelectrode fabricated by ECM are better than those of themicroelectrode fabricated by EDM, but the shape and the microhardness are worse than those of themicroelectrode fabricated by EDM. Both of them can fabricate the cylindrical tungstenmicroelectrodes with several micrometers diameter
Type of Medium:
Electronic Resource
URL:
http://www.tib-hannover.de/fulltexts/2011/0528/01/57/transtech_doi~10.4028%252Fwww.scientific.net%252FKEM.375-376.298.pdf
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