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  • 1
    Electronic Resource
    Electronic Resource
    Two-temperature fluid model for high-pressure plasmas in contact with cooled electrodes (1993)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 73 (1993), S. 3172-3182 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A detailed continuum model of a weakly ionized plasma in stagnation flow against an electrically biased surface is presented. The model includes bulk fluid motion as well as electron and ion momentum and continuity equations in both general and quasineutral formulations. The inclusion of both electron and bulk energy equations allows for the determination of electron temperature and deviations from local thermodynamic equilibrium. Results for the quasineutral model demonstrate the importance of considering thermal nonequilibrium in the evaluation of plasma properties in the presheath region. The evaluation of transport properties is self-consistent with properties for the charged species depending on the calculated electric field and neutral number density. In addition to investigating thermal boundary layer and fluid flow effects, a finite electron-ion recombination rate at the electrode surface is employed and the consequences of varying this boundary condition are explored.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.352961
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  • 2
    Electronic Resource
    Electronic Resource
    A model of diamond growth in low pressure premixed flames (1992)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 72 (1992), S. 5461-5466 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Recognizing the potential importance of diamond thin film growth from combustion environments, a computational investigation of diamond synthesis in low pressure premixed flames has been conducted. The model employed solves the two-dimensional continuity, momentum, global energy, and species conservation equations in stagnation point flow geometry, and accounts for gas phase and surface reaction kinetics. The heterogeneous mechanism employed to describe diamond growth assumes that the methyl radical is the primary growth precursor. The gas phase mechanism includes elementary reaction pathways which generate methyl radicals from acetylene and in addition, includes a mechanism for cyclization (the formation of benzene) via acetylene and ethylene precursors. In this way, the pathway towards soot formation, which is believed to be a consequence of the formation of fused polycyclic aromatics, is shown to be a possible explanation for an eventual decrease in diamond growth rates at increasing fuel to oxygen flow ratios. A competition between oxidative pyrolysis of post flame hydrocarbons and cyclization establishes a criterion for optimum growth conditions.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.351989
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  • 3
    Electronic Resource
    Electronic Resource
    A 3-dimensional model for low-pressure chemical-vapor-deposition step coverage in trenches and circular vias (1991)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 70 (1991), S. 7137-7140 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A general analytical model has been developed to calculate particle transport and spatial step coverage evolution within 2-dimensional and 3-dimensional microelectronic device structures during low-pressure chemical vapor deposition. The model can account for spatially dependent nonunity reactive "sticking probabilities,'' anisotropic source fluxes, and trench "shadowing'' effects. There is no restriction on the initial and evolving shape of the structure. Model results are compared to direct Monte Carlo simulations for step coverage on rectangular trenches, and are found to more accurately describe the observed experimental step coverages during phosphorous-doped silicon dioxide glass film deposition. We present here, for the first time, detailed calculations of step coverage in circular vias for a wide range of reactive sticking probabilities.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.349797
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  • 4
    Electronic Resource
    Electronic Resource
    Stability of a magnetized Hall plasma discharge (2001)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 89 (2001), S. 3099-3107 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Using recent experimental data on the time-averaged, spatially varying plasma properties within a Hall discharge plasma, we present in this article, a theoretical study of the response of this plasma to small (linear) perturbations in its properties. As a starting point for this analysis, we assume a two-dimensional fluid description that includes a simplified equation for the electron energy, and constrain the azimuthal wave vector such that we excite only the dominant (m=1) azimuthal modes. The growth rate and frequencies of predominantly axial and azimuthally propagating plasma disturbances are obtained by numerical solution of the resulting eigenvalue problem under a quasiuniform plasma condition, along the entire discharge channel. The results identify the persistence of a low frequency instability that is associated with the ionization process, concentrated largely in the vicinity of the exit plane, where the magnetic field is at its maximum value, consistent with experimental observations for the relatively low operating voltages (∼100 V) considered in this study. © 2001 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1346656
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  • 5
    Electronic Resource
    Electronic Resource
    Laser-induced fluorescence imaging of laser-ablated barium (1990)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 56 (1990), S. 1715-1717 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We have applied laser-induced fluorescence diagnostics to expanding recombining barium plasmas produced by laser ablation. For relatively modest ablation laser energy fluences (∼102–103 W cm−2), we have measured neutral barium leading edge density gradients of 1012–0.5×1013 cm−3 cm−1 and cloud expansion velocities of ∼106 cm s−1, consistent with recent results of ablation studies in copper [R. J. von Gutfeld and D. W. Dreyfus, Appl. Phys. Lett. 54, 1212 (1989)].
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.103124
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  • 6
    Electronic Resource
    Electronic Resource
    Sodium atom distribution within a heat sandwich oven (1985)
    [S.l.] : American Institute of Physics (AIP)
    Review of Scientific Instruments 56 (1985), S. 2030-2037 
    Details
    ISSN: 1089-7623
    Source: AIP Digital Archive
    Topics: Physics , Electrical Engineering, Measurement and Control Technology
    Notes: In a heat sandwich oven the metal vapor is confined to be disk shaped and is optically accessible through 360° in the plane of the disk. We have used this feature to optically measure the radial atom density distribution of sodium vapor within this type of oven, under a range of conditions. In particular, we have observed the formation of a donut-shaped atom density distribution when the heat sandwich oven is operated at high temperatures with an under pressure of the argon buffer gas.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.1138413
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  • 7
    Electronic Resource
    Electronic Resource
    Diamond film growth in low pressure premixed ethylene-oxygen flames (1994)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 65 (1994), S. 2786-2788 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: A study of diamond film synthesis in low pressure premixed ethylene-oxygen flames is described. Experiments are performed in a low pressure flat-flame facility that has been employed previously to study diamond synthesis in premixed acetylene-oxygen flames. High film quality and uniformity are observed for substrate temperatures of approximately 700 °C and flame equivalence ratios of 2.41. There exists a distinct range in flame equivalence ratios for high quality diamond deposition that is comparable to that seen in acetylene-oxygen mixtures. The measured diamond growth rates are approximately one-quarter of that observed for acetylene-oxygen flames. However, when factoring in differences in the operating conditions, carbon utilization is approximately one-half of that observed for premixed acetylene-oxygen flames. © 1994 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.112563
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  • 8
    Electronic Resource
    Electronic Resource
    Diamond film synthesis in low-pressure premixed methane-oxygen flames (1995)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 67 (1995), S. 1081-1083 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We present the successful demonstration of diamond film synthesis in low-pressure premixed methane-oxygen flames. Experiments are performed in a low-pressure flat-flame facility that has been employed previously to study diamond synthesis in premixed acetylene-oxygen and ethylene-oxygen flames. The quality of the diamond films deposited is comparable to that deposited using these other flames, and the growth rate is approximately 0.2–0.3 μm/h; some factor of 10 less than acetylene-oxygen flames and one-third of that obtained for ethylene-oxygen flames. However, carbon conversion efficiencies are remarkably similar, since the cold gas velocities used here are substantially less, because of the lower burning velocities. The equivalence ratios employed in these methane-oxygen flames are in the 1.8–2.0 range. These values correspond to C:O ratios that are substantially lower than those that have been used to grow good quality diamond in acetylene-oxygen and ethylene-oxygen flames at low and atmospheric pressure. General observations suggest that the quality is only slightly sensitive to changes in equivalence ratios and very sensitive to substrate temperature. Uniform diamond films over areas of about 5.5 cm2 are deposited with substrate temperatures of approximately 900 °C. © 1995 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.114456
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  • 9
    Electronic Resource
    Electronic Resource
    Cubic boron nitride synthesis in low-density supersonic plasma flows (1996)
    Woodbury, NY : American Institute of Physics (AIP)
    Applied Physics Letters 68 (1996), S. 2711-2713 
    Details
    ISSN: 1077-3118
    Source: AIP Digital Archive
    Topics: Physics
    Notes: We report on the growth of cubic boron nitride films on {100} silicon using a low density, supersonic plasma jet generated by a direct-current arc discharge expanded to low pressures. The arc discharge was operated on source gas mixtures of nitrogen and argon, with boron trichloride injected downstream of the expansion nozzle. The films were analyzed by infrared absorption and x-ray photoelectron spectroscopy. Phase selectivity was obtained by the application of a negative bias to the substrate so as to bombard the surface with energetic ions during deposition. The deposition process was found to be highly sensitive to substrate temperature and substrate bias voltage. © 1996 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.115573
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  • 10
    Electronic Resource
    Electronic Resource
    Temperature measurements in low-pressure, diamond-forming, premixed flames (1998)
    [S.l.] : American Institute of Physics (AIP)
    Journal of Applied Physics 84 (1998), S. 4595-4602 
    Details
    ISSN: 1089-7550
    Source: AIP Digital Archive
    Topics: Physics
    Notes: Measurements of temperature in low-pressure, diamond-forming, premixed flames are described. Optical emission spectroscopy was used to determine the rotational temperature of CH radicals in the flame by analyzing the spectra of the R-branch of the A 2Δ→X 2Π(0,0) CH electronic transition near 430 nm. Emission spectroscopic measurements were taken in stagnation-point flames of three different fuel types; CH4–O2, C2H4–O2, and C2H2–O2 flames, all of which have been previously used in the synthesis of diamond films. The emission-based rotational temperatures are found to be in good agreement with temperature measurements from thermocouples for the CH4–O2 flame, when a correction is made to the thermocouple measurements for radiation losses. The measurements show that peak flame temperatures are higher than the adiabatic flame temperatures for both C2H4–O2, and C2H2–O2 flames; a result that is also predicted by a numerical simulation of the stagnation-point strained flame that accounts for detailed finite-rate gas-phase chemistry and heterogeneous surface reactions. © 1998 American Institute of Physics.
    Type of Medium: Electronic Resource
    URL: http://dx.doi.org/10.1063/1.368685
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