ISSN:
0142-2421
Keywords:
Chemistry
;
Polymer and Materials Science
Source:
Wiley InterScience Backfile Collection 1832-2000
Topics:
Physics
Notes:
The laser induced redistribution and desorption of dopant atoms (B, As, Sb) is measured in presence and in absence of chlorine at the surface. We define a desorption efficacy which is found to depend strongly on the dopant atom, increasing from boron to arsenic and to antimony. The implications for etching, doping and annealing experiments are discussed.
Additional Material:
3 Ill.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1002/sia.740220109
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