ISSN:
1573-8906
Quelle:
Springer Online Journal Archives 1860-2000
Thema:
Elektrotechnik, Elektronik, Nachrichtentechnik
Notizen:
Abstract An analysis is given of the problem of making sensors for quantities in physics and physical chemistry based on the achievements of microelectronics. The modem technical design basis of microelectronic sensors is considered together with the direction of its further development. Data and results are given concerning the development of microelectronic force, pressure, magnetic field, and hydrogen-leakage sensors.
Materialart:
Digitale Medien
URL:
http://dx.doi.org/10.1007/BF00993602
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