ISSN:
1572-8943
Keywords:
CVD
;
ruthenium Β-diketonates
;
thermal stability
;
vapour pressure
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
Notes:
Abstract By means of a tensimetric flow method and a static method with a silica-membrane zero gauge, the dependence of vapour pressure on temperature was obtained for tris(2,4-pentanedionato)ruthenium(III), Ru(aa)3, and tris(1,1,1-trifluoropentane-2,4-dionato)ruthenium(III), Ru(tfa)3. The thermodynamic characteristics of vaporization and sublimation of these complexes were determined. The processes of thermal decomposition of the vapour of the compounds in vacuum, hydrogen and oxygen were investigated by using mass spectrometry in the temperature range 170–550
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1007/BF01980761
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