ISSN:
1573-4854
Keywords:
porous silicon
;
X-ray diffraction
;
differential scanning calorimetry
Source:
Springer Online Journal Archives 1860-2000
Topics:
Chemistry and Pharmacology
,
Mechanical Engineering, Materials Science, Production Engineering, Mining and Metallurgy, Traffic Engineering, Precision Mechanics
Notes:
Abstract The structural properties of (111) oriented p+ type Porous Silicon (PS) samples are investigated using various X-ray diffraction techniques and compared to (001) p+ type PS layer structure. High resolution X-ray diffractometry was used to record rocking curves and reciprocal space maps, giving indications about the crystalline quality of the PS samples as well as about the pore orientation. X-ray diffraction and reflectivity performed on thin PS layers allow to estimate the layer thickness, porosity and roughness of the PS/substrate interface.
Type of Medium:
Electronic Resource
URL:
http://dx.doi.org/10.1023/A:1009691122195
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